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Unfortunately, foundry needs design data to mature its recipes as well and can .... finding was used to formula our gauge for âun-OPC-ableâ pattern. Furthermore ...
Jun 6, 2007 - Issues of prior-art: Post-OPC approach. Attempt to simulate post-OPC contour, CD, EPE. Need tremendous amount of foundry information. Foundry needs design data to refine its recipes. Foundry recipes are not matured till late in technolo
illustrates the definition of image contrast. Figure1. ... If the gradient is beyond pre-defined threshold ... This pattern complies with design rule and has minimum.