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process that achieves improved contact and stability on. SiGe. This is followed by ... AFM image of the surface morphology of the source/drain area of the pFET ...
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Dec 24, 2008 - gate Ge pMOS devices in a Si-compatible process flow [2],. [3]. Other groups ... G. Hellings is with the Interuniversity Microelectronics Center, 3001. Leuven, Belgium, and with ... Spacer definition and HDD implants are followed by. N
advanced strain and activation techniques, iii) a functional. SRAM with cell size ... An illustration of stress loss with reduced pitch is shown in. Fig 7. To overcome ...
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