Thermal Evaporator User Log Deposition Condition

Date Source Location

User

Current (A)

Thickness (Å)

(Boat, Sensor

Material

Target

Program

Actual

Rate (Å/s)

Target

etc)

Sensor Life (%)

Result

Current Source

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

A

Å

Material

Name

%

Prog. Current Source Material

Name

%

Prog. Current Source Material

Name

%

Prog. Current Source Material

Name

%

Prog. Current Source Material

Name

%

Prog. Current Source Material

Name

%

Prog. Current Source Material

Name

%

Prog.

Memo

Thermal Evaporator User Log

Thermal Evaporator User Log. Date. Deposition Condition. Memo. (Boat, Sensor etc). Source. Location. Current (A). Rate (Å/s). Thickness (Å). User. Material. Target. Target. Sensor Life. (%). Program. Actual. Result. Current. A. Å. Source. Name. Material. A. Å. % Prog. Current. A. Å. Source. Name. Material. A. Å. % Prog.
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